2013-2014/2011-2012/2009-2010/2007-2008/2006-2005/2004-2003/2002-2001
International conference

2004
  1. T. Aoki and J. Matsuo
    gMolecular Dynamics Study of Sputtering Process by Reactive Cluster Impactsh,
    2004 MRS Fall Meeting (Boston, USA, 2004/11/29-12/2)

  2. T. Seki and J. Matsuo
    gHigh-speed Processing with Reactive Cluster Ion Beamsh,
    2004 MRS Fall Meeting (Boston, USA, 2004/11/29-12/2)

  3. T. Aoki and J. Matsuo
    gMolecular Dynamics Simulation of Ultra-Shallow Surface Process by Cluster Ion Impacth,
    15th International Conference on Ion Implantation Technology (Taipei, Taiwan, 2004/10/25-29)

  4. T. Seki and J. Matsuo
    gDevelopment of 1mA Cluster Ion Beam sourceh,
    15th International Conference on Ion Implantation Technology (Taipei, Taiwan, 2004/10/25-29)


  5. T. Aoki and J. Matsuo
    gComputer Simulations of Surface Modification Process with Cluster Ion Beamsh,
    18th International Conference on the Application of Accelerators in Research & Industry (Fort Worth, USA, 2004/10/10-15)

  6. T. Seki and J. Matsuo
    gEnergy Distributions of Highe Current Cluster Ion Beamsh,
    18th International Conference on the Application of Accelerators in Research & Industry (Fort Worth, USA, 2004/10/10-15)


  7. T. Aoki and J. Matsuo,
    gMolecular Dynamics Simulations of Surface Modification by Large Gas Cluster Ion Impactsh,
    14th International Conference on Ion Beam Modification of Materials (Pacific Grove, USA, 2004/9/5-12)

  8. T. Seki, T. Murase and J. Matsuo
    gCluster Size Depencence of Sputtering Yield by Cluster Ion Beam Irradiationh,
    14th International Conference on Ion Beam Modification of Materials (Pacific Grove, USA, 2004/9/5-12)


  9. Y. Nakata, S. Ninomiya, C. Imada, M. Nagai, T. Aoki, J. Matsuo and N. Imanishi
    gSecndary Neutral and Ionized Paticle Measurements under MeV-energy Si Ion bombardmenth,
    International Conference of Atomic Collision in Solids (Genova, Italy, 2004/7/4-9)


  10. S. Ninomiya, C. Imada, M. Nagai, Y. Nakata, T. Aoki, J. Matsuo and N. Imanishi,
    gTotal Sputtering Yields of Solids under MeV-energy Si Ion bombardmenth,
    International Conference of Atomic Collision in Solids (Genova, Italy, 2004/7/4-9)


  11. T. Aoki and J. Matsuo,
    gMolecular Dynamics Simulations of Sequential Cluster Ion Impactsh,
    7th International Conference on Computer Simulation of Radiation Effects in Solids (Helsinki, Finland, 2004/6/28-7/2)


  12. T. Aoki and J. Matsuo,
    gSurface structure dependence of impact processes of gas cluster ionsh,
    International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources (Osaka, Japan, 2004/3/19-22)


  13. T. Seki and J. Matsuo,
    gDevelopment of the Large Current Cluster Ion Beam Technologyh,
    International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources (Osaka, Japan, 2004/3/19-22)

2003
  1. T. Aoki and J. Matsuo,
    gMolecular Dynamics Study of Surface Morphological Evolution by Cluster Impactsh,
    2003 MRS Fall Meeting (Boston, USA, 2003/12/1-5)


  2. T. Seki and J. Matsuo,
    gHigh-speed Machining with Cluster Ion Beamsh,
    2003 MRS Fall Meeting (Boston, USA, 2003/12/1-5)

  3. T. Aoki and J. Matsuo,
    gSurface Structure Dependence of Impact Processes of Gas Cluster Ionsh,
    4th Workshop on Cluster Ion Beam Process Technology (Tokyo, Japan, 2003/9/10-12)


  4. T. Seki and J. Matsuo,
    gDevelopment of the Large Current Cluster Ion Beam Technologyh,
    4th Workshop on Cluster Ion Beam Process Technology (Tokyo, Japan, 2003/9/10-12)


  5. E. Bourelle, A. Suzuki, A. Sato, T. Seki, J. Matsuo,
    gHighly Accurate Machining of Silicon through Thin Film Masks with High Etching Selectivity using Gas Cluster Ion Beamh,
    4th Workshop on Cluster Ion Beam Process Technology (Tokyo, Japan, 2003/9/10-12)

  6. T. Aoki, J. Matsuo and G. Takaoka,
    gSurface structure dependence of impact processes of gas cluster ionsh,
    European Materials Research Society Spring Meeting (Strasbourg, France, 2003/6/10-13)


  7. T. Seki, J. Matsuo and G. Takaoka,
    gSurface Smoothing with Large Current Cluster Ion Beamh,
    European Materials Research Society Spring Meeting (Strasbourg, France, 2003/6/10-13)



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